MICRO/NANO DEVICES AND SYSTEMS LABORATORY

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Location: Department of Electrical and Electronics Eng., Ground Floor EEM133

Laboratory Supervisors: Assoc. Prof. Dr. Feridun AY, Assoc. Prof. Dr. Nihan KOSKU PERKGÖZ, Res. Asst. Mustafa DEMİRTAŞ, Res. Asst. Hüseyin ŞAR

Laboratory Operation: Students who wants to work in the lab need to get in touch with supervisors to get permission.

Equipment List;

-          Atomic Layer Deposition

-          Micro-Raman

-          FTIR

-          Prism Coupler

-          Profiler

-          Microscope

-          Glove Box

-          Optic Table

-          Fiber optic laser systems

Applications that can be done in the lab.;

The laboratory is divided into 2 sections. The first part is opto-electronic laboratory and the other is the class 100 cleanroom.

-          Thin film growth

-          Waveguide fabrication

-          Transistor fabrication

-          Refractive index measurement

-          Devices thickness measurement

-          Optic and electrical characterization

-          Laser power measurement and polarization control

-          Step high thickness measurement in nanometer scale

-          Optic mode and loss measurement

-          Fiber optic measurement systems

-          Lithography processes